Fluorine-doped tungsten oxide (WO3) plate-like films were synthesized by hydrothermal radio-frequency (RF) sputtered tungsten (W) thin films in HF solution. The crystal structure, composition and morphology of nitrogen fluorine (F) doped WO3 were characterized by scanning electron microscope (SEM), X-ray diffractometer (XRD), X-ray photoelectron spectroscopy (XPS), and UV-Vis diffuse reflectance spectra (DRS) techniques. The results indicate that fluorine can be doped successfully into WO3 plate-like films by hydrothermal synthesis in hydrofluoric acid (HF) solution. The F-doped WO3 samples sh...
