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Effect of Growth Pressure on Epitaxial Graphene Grown on 4H-SiC Substrates by Using Ethene Chemical Vapor Deposition

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成果类型:
期刊论文
作者:
Cai, Shuxian;Liu, Zhonghua;Zhong, Ni;Liu, Shengbei;Liu, Xingfang*
通讯作者:
Liu, Xingfang
作者机构:
[Liu, Zhonghua; Zhong, Ni; Cai, Shuxian] Hunan Agr Univ, Natl Res Ctr Engn Technol Utilizat Funct Ingredie, Changsha 410128, Hunan, Peoples R China.
[Liu, Xingfang; Liu, Shengbei] Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China.
[Liu, Xingfang] Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, POB 912, Beijing 100083, Peoples R China.
通讯机构:
[Liu, Xingfang] C
Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, POB 912, Beijing 100083, Peoples R China.
语种:
英文
关键词:
4H-SiC;chemical vapor deposition;epitaxial graphene;face dependences;growth pressure
期刊:
Materials
ISSN:
1996-1944
年:
2015
卷:
8
期:
9
页码:
5586-5596
基金类别:
National Natural Science Foundation of ChinaNational Natural Science Foundation of China (NSFC) [31471590, 61274007]; Beijing Natural Science FoundationBeijing Natural Science Foundation [4132074]
机构署名:
本校为第一机构
院系归属:
园艺园林学院
摘要:
The Si(0001) face and C(000-1) face dependences on growth pressure of epitaxial graphene (EG) grown on 4H-SiC substrates by ethene chemical vapor deposition (CVD) was studied using atomic force microscopy (AFM) and micro-Raman spectroscopy (μ-Raman). AFM revealed that EGs on Si-faced substrates had clear stepped morphologies due to surface step bunching. However, This EG formation did not occur on C-faced substrates. It was shown by μ-Raman that the properties of EG on both polar faces were different. EGs on Si-faced substrates were relatively thinner and more uniform than on C-faced sub...

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