期刊论文

Wu Zhi-Li

中文

无机材料学报

1000-324X

2015

30

12

1254-1260

10.15541/jim20150096

National Natural Science Foundation of ChinaNational Natural Science Foundation of China (NSFC) [51102032]; Foundation for Innovative Research Groups of National Natural Science Foundation of ChinaNational Natural Science Foundation of China (NSFC) [51321004]

本校为其他机构

采用高功率调制脉冲磁控溅射Al/(Al+Ti)原子比(x)分别为0.25、0.5和0.67的TiAlSi合金靶, 溅射功率1~4 kW, 氮气分压25%, 工作气压0.3 Pa, 在Si(100)和AISI 304奥氏体不锈钢基片上沉积了TiAlSiN纳米复合涂层。TiAlSiN涂层中氮含量保持在52.0at%~56.7at%之间, 均形成了nc-TiAlN/a-Si_3N_4/AlN纳米晶/非晶复合结构。随着原子比x增加, 非晶含量增加, 涂层硬度先升高而后降低。当x=0.5时, 硬度最高可达28.7 GPa。溅射功率升高可提高溅射等离子体中金属离化程度, 促进涂层调幅分解的进行, 形成了界面清晰的非晶包裹纳米晶结构, 且晶粒尺寸基本保持不变。当x=0.67时, 溅射功率由1 kW上升到4 kW时, 硬度...

TiAlSiN nanocomposite coatings were deposited by modulated pulsed power magnetron sputtering (MPPMS) from TiAlSi targets with the Al/(Al+Ti) atomic ratios (x) of 0.25, 0.5 and 0.67. The targets were powered by average sputtering power of 1-4 kW under work pressure of 0.3 Pa with a nitrogen addition of 25%. All of the TiAlSiN coatings with a nitrogen content of 52.0at%~56.7at% possessed an nc-TiAlN/a-Si3N4/AlN nanocomposite structure. As x increased, the percentage of amorphous phases was increased, meanwhile the hardness of the coatings firstly increased and then decreased. In the TiAlSiN coat...